Defect Detection Microscope
Description
Features
Shipping
- 200mm or 300mm X-Y stage
- BF/DF (standard), Nomarski (optional), UV and IR versions available
- Defect detection, classification and review (review-only optional)
- Reflected light (standard), transmitted light for mask inspection (optional)
- Video autofocus (standard), laser autofocus (optional)
- McBain Ergo workstation (standard), TMC isolation workstation (optional)
- McBain lead screw/universal nut driven cross roller bearing stage, or
- McBain high-speed linear motor stage
- Monochrome or color 5-megapixel digital camera
- Wafer- and mask-loading options available
- Standard working distance, long working distance and super-long working distance objectives
- 2x, 5x, 10x, 20x, 50x, 100x, 150x, 200x objectives (20x to 2000x magnification)
- 6 inches of vertical travel
- Manual or motorized X, Y, Z, and theta axis options