

Defect Detection Microscope
Description
Features
Shipping
200mm and 300mm Defect Detection and Review Systems
The McBain DDR200 and DDR300 for 200mm and 300mm wafer defect detection and review are unmatched in value and features in this special application and price category. The systems offer significant and unique advantages for both production and engineering use, and provide an ideal solution when both defect detection and dimensional metrology are required. They can be used as dedicated production tools or as versatile process development tools.
- 200mm or 300mm X-Y stage
- BF/DF (standard), Nomarski (optional), UV and IR versions available
- Defect detection, classification and review (review-only optional)
- Reflected light (standard), transmitted light for mask inspection (optional)
- Video autofocus (standard), laser autofocus (optional)
- McBain Ergo workstation (standard), TMC isolation workstation (optional)
- McBain lead screw/universal nut driven cross roller bearing stage, or
- McBain high-speed linear motor stage
- Monochrome or color 5-megapixel digital camera
- Wafer- and mask-loading options available
- Standard working distance, long working distance and super-long working distance objectives
- 2x, 5x, 10x, 20x, 50x, 100x, 150x, 200x objectives (20x to 2000x magnification)
- 6 inches of vertical travel
- Manual or motorized X, Y, Z, and theta axis options
We can ship this item worldwide. If you would like a specific quote and estimated delivery time, contact us today.