Defect Detection Microscope

  • 200mm or 300mm X-Y stage
  • BF/DF (standard), Nomarski (optional), UV and IR versions available
  • Defect detection, classification and review (review-only optional)
  • Reflected light (standard), transmitted light for mask inspection (optional)
  • Video autofocus (standard), laser autofocus (optional)
  • McBain Ergo workstation (standard), TMC isolation workstation (optional)
  • McBain lead screw/universal nut driven cross roller bearing stage, or
  • McBain high-speed linear motor stage
  • Monochrome or color 5-megapixel digital camera
  • Wafer- and mask-loading options available
  • Standard working distance, long working distance and super-long working distance objectives
  • 2x, 5x, 10x, 20x, 50x, 100x, 150x, 200x objectives (20x to 2000x magnification)
  • 6 inches of vertical travel
  • Manual or motorized X, Y, Z, and theta axis options
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