Wafer Handling Microscope

  • Model WL 150: 3″, 4″, 5″ and 6″ wafers
  • Model WL 200: 4″, 5″, 6″and 8″ wafers
  • High throughput > 750 wph
  • Uses “smart” stepper motors for drive axis
  • Stall and fault detection
  • Linear stages provide smooth, repeatable motion
  • Spring-loaded counterbalance supports load to protect Z-axis mechanism
  • User-defined inspection positions
  • Vacuum touch end effector with sensing
  • Multiple programs
  • Intuitive touch screen interface
  • HMI (Human Machine Interface) and numeric keypad
  • HMI housed in mountable enclosure with standard VESA interface
  • Remote pendant controller