Benchtop IR (BT-IR) interior observation, imaging, verification and inspection
The McBain BT-IR Benchtop IR Infrared Microscope System is a powerful and flexible tool with a small footprint and an affordable price — for interior observation, imaging, verification and inspection of materials that are transparent in NIR (740nm to 1100nm) and SWIR (900nm to 1700nm).
The system features a motorized XY stage with joystick controls to navigate, observe and measure bonded wafer/die alignments, find defects in a manual mode and determine material stress via the system’s optional birefringence capability. The BT-IR is well suited for QA/Reliability and R&D to enable continuous process improvements for production. Typical applications include bonded wafer alignment metrology, die alignment metrology, sub-surface inspection, MEMS device inspection, 3D stacking process development and control, incoming wafer inspection, birefringence for material stress characterization, wafer-level CSP’s, and much more.
McBain BT-IR systems are available with a variety of optical and illumination accessories and custom wafer/part fixtures.
Key Features
- Cooled InGaAs digital SWIR camera (900-1700nm)
- Silicon-based digital camera option for NIR applications
- NIR/SWIR-optimized Koehler Epi-illumination
- Sub-stage illumination for transmitted NIR/SWIR applications
- Filters for specific wavelengths
- Diffusion filters for even illumination
- Polarization and analyzer filter sets
- Aperture and field diaphragms for image optimization
- Multiple series of NIR/SWIR objectives for application optimization, 1x through 100x objectives (Effective 10x to 1000x magnification)
- Submicron optical and digital resolution
- 8″ x 8″ motorized XY stage (other sizes available)
- Manual or motorized objective turrets
- DRO (Digital Read Out display) for measurements and coordinates
- Large monitor for live and stored image display
