NIR Automatic Inspection Microscope

Details

The McBain NIR 200 is a fully-automated near-infrared inspection system for extracting wafers from a source cassette and measuring multiple alignment targets with 0.5 micron repeatability. The tool can be run in manual, local auto or full remote through GEM/SECS.

NIR Automatic Inspection Microscope

Features:

Automatic loading and unloading of 4″, 6″ and 8″ wafers
Motorized X, Y, Z and theta axis
900nm to 1700nm custom optical system provides best-in-class NIR visibility
Highly sensitive InGaAs camera
Integrated vision system and customizable software for:
- Image optimization
- Part recipe
- Palletization
- Critical measurements
- Defect detection and classification
6 inches of vertical Z travel allows custom tooling
6″, 8″ or 12″ travel XY stage options
- solid reflected or transmitted light
- manual coarse, fine or motorized options
0.5 micron feature resolution
0.1 micron positioning accuracy and repeatability
Turnkey integrated motion control packages
Ergonomic 3 axis joystick and trackball controls
Vibration isolation
Custom configurations available

Fully-automatic Measuring and Alignment Microscope and Handling System

The NIR200 is a reliable production tool that is highly configurable to end-user needs. Throughput is partly dependent on the number of sites per wafer; a nine-site inspection set-up can run a cassette of 25 wafers in 45 minutes. The NIR200 is best-in-class for wafer-to-wafer and die-to-die critical alignment measurement and verification. This unique tool has been sold into many industries and a range of applications including sub-surface wafer and die inspection for cracks and bond integrity, MEMS, wafer bonding, 3-D chip stacking, failure analysis, process development, tool verification, part characterization, environmental testing and more.

See also the semi-automatic version of this tool.

We can ship this item worldwide. If you would like a specific quote and estimated delivery time, contact us today.