Benchtop IR (BT-IR) interior observation, imaging, verification and inspection

The McBain BT-IR Benchtop IR Infrared Microscope System is a powerful and flexible tool with a small footprint and an affordable price — for interior observation, imaging, verification and inspection of materials that are transparent in NIR (740nm to 1100nm) and SWIR (900nm to 1700nm).

The system features a motorized XY stage with joystick controls to navigate, observe and measure bonded wafer/die alignments, find defects in a manual mode and determine material stress via the system’s optional birefringence capability. The BT-IR is well suited for QA/Reliability and R&D to enable continuous process improvements for production. Typical applications include bonded wafer alignment metrology, die alignment metrology, sub-surface inspection, MEMS device inspection, 3D stacking process development and control, incoming wafer inspection, birefringence for material stress characterization, wafer-level CSP’s, and much more.

McBain BT-IR systems are available with a variety of optical and illumination accessories and custom wafer/part fixtures.

Key Features

  • Cooled InGaAs digital SWIR camera (900-1700nm)
  • Silicon-based digital camera option for NIR applications
  • NIR/SWIR-optimized Koehler Epi-illumination
  • Sub-stage illumination for transmitted NIR/SWIR applications
  • Filters for specific wavelengths
  • Diffusion filters for even illumination
  • Polarization and analyzer filter sets
  • Aperture and field diaphragms for image optimization
  • Multiple series of NIR/SWIR objectives for application optimization, 1x through 100x objectives (Effective 10x to 1000x magnification)
  • Submicron optical and digital resolution
  • 8″ x 8″ motorized XY stage (other sizes available)
  • Manual or motorized objective turrets
  • DRO (Digital Read Out display) for measurements and coordinates
  • Large monitor for live and stored image display