McBain DDR200/300 NIR-SWIR Infrared Microscope

  • Designed for automatic / semiautomatic operation
  • Extensive defect detection features and capability
  • Integrated dimensional metrology features
  • Able to penetrate thicker materials, more highly doped materials and rougher surfaces than other systems
  • Submicron-precision optical measurements
  • High-accuracy staging, to 20nm linear encoder resolution
  • Highest resolution 900-1700nm InGaAs digital camera in class
  • High-speed linear servo motor staging
  • 50-500 defects/measurement/second per field of view, typical
  • Very easy to use, program and set up
  • Multiple wafer/die/part handling systems available
  • Application-specific customizable software
  • Semi Standard S2/S8 compliant
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