McBain Z-NIR Inspection Microscope

Semi-automatic Measuring and Alignment System

The McBain Z-NIR Near Infrared Inspection System is best-in-class for wafer-to-wafer and die-to-die alignment measurement and verification. This unique tool has been sold into many industries with various applications including sub-surface wafer and die inspection for cracks and bond integrity, MEMS, wafer bonding, 3-D chip stacking, failure analysis, process development, tool verification, part characterization, environmental testing and more.

See also the fully-automated version of this tool.

900nm to 1700nm custom optical system provides best-in-class NIR visibility
Highly sensitive InGaAs camera
Integrated vision system and customizable software for:
- Image optimization
- Part recipe
- Palletization
- Critical measurements
- Defect detection and classification
6 inches of vertical Z travel allows custom tooling
Manual or motorized systems available
6″, 8″ or 12″ travel XY stage options
- solid reflected or transmitted light
- manual coarse, fine or motorized options
0.5 micron feature resolution
0.1 micron positioning accuracy and repeatability
Turnkey integrated motion control packages
Ergonomic 3 axis joystick and trackball controls
Vibration isolation
Custom configurations available

McBain Z-NIR Inspection Microscope

Semi-automatic Measuring and Alignment System

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