NIR Automatic Inspection Microscope

  • Automatic loading and unloading of 4″, 6″ and 8″ wafers
  • Motorized X, Y, Z and theta axis
  • 900nm to 1700nm custom optical system provides best-in-class NIR visibility
  • Highly sensitive InGaAs camera
  • Integrated vision system and customizable software for:
    • Image optimization
    • Part recipe
    • Palletization
    • Critical measurements
    • Defect detection and classification
  • 6 inches of vertical Z travel allows custom tooling
  • 6″, 8″ or 12″ travel XY stage options
    • solid reflected or transmitted light
    • manual coarse, fine or motorized options
  • 0.5 micron feature resolution
  • 0.1 micron positioning accuracy and repeatability
  • Turnkey integrated motion control packages
  • Ergonomic 3 axis joystick and trackball controls
  • Vibration isolation
  • Custom configurations available
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